Embedded Systems Conference
Breaking News
Comments
mcgrathdylan
User Rank
Author
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
mcgrathdylan   2/13/2012 7:00:23 PM
NO RATINGS
A promising development, but even if they make it to 10 wafers per hour, how many manufacturers will embrace this technology?

any1
User Rank
Author
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
any1   2/14/2012 12:55:42 AM
NO RATINGS
I think that are many companies that would use a 10 wafer per hour direct write ebeam tool. Mask costs near leading edge nodes are quite expensive - as are any alternative lithography approaches. And it's likely that throughput would be even higher at higher design nodes. For small volumes and rapid prototyping it would be valuable. And of course some people would be interested in it as a faster mask writing tool.

DanielRavenNest
User Rank
Author
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
DanielRavenNest   2/14/2012 1:00:28 AM
NO RATINGS
It depends on the cost of the machine. If it's maskless and does not require expensive EUV sources and mirrors, the machine could be potentially less expensive. In that case you just buy more machines to reach the production rate you want.

Brutus_II
User Rank
Author
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
Brutus_II   2/14/2012 5:10:52 PM
NO RATINGS
Electron microscopes have been converted to e-beam litho at a cost of about $100k that produce 20nm line widths. These can be used for very limited production. The new vector scan (shaped beams) are very expensive (I think they're over $6kk per machine), which makes it questionable whether it's practical to simply add more machines to make up for the lack of processing speed.

resistion
User Rank
Author
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
resistion   2/22/2012 2:32:08 AM
NO RATINGS
If there is a fast (10-100 wph) low-energy (less than keV) e-beam ready at 14 nm or 10 nm, that would be an EUV-killer.



Radio
LATEST ARCHIVED BROADCAST
As data rates begin to move beyond 25 Gbps channels, new problems arise. Getting to 50 Gbps channels might not be possible with the traditional NRZ (2-level) signaling. PAM4 lets data rates double with only a small increase in channel bandwidth by sending two bits per symbol. But, it brings new measurement and analysis problems. Signal integrity sage Ransom Stephens will explain how PAM4 differs from NRZ and what to expect in design, measurement, and signal analysis.

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
Like Us on Facebook
Special Video Section
The LTC®6363 is a low power, low noise, fully differential ...
Vincent Ching, applications engineer at Avago Technologies, ...
The LT®6375 is a unity-gain difference amplifier which ...
The LTC®4015 is a complete synchronous buck controller/ ...
10:35
The LTC®2983 measures a wide variety of temperature sensors ...
The LTC®3886 is a dual PolyPhase DC/DC synchronous ...
The LTC®2348-18 is an 18-bit, low noise 8-channel ...
The LT®3042 is a high performance low dropout linear ...
Chwan-Jye Foo (C.J Foo), product marketing manager for ...
The LT®3752/LT3752-1 are current mode PWM controllers ...
LED lighting is an important feature in today’s and future ...
Active balancing of series connected battery stacks exists ...
After a four-year absence, Infineon returns to Mobile World ...
A laptop’s 65-watt adapter can be made 6 times smaller and ...
An industry network should have device and data security at ...
The LTC2975 is a four-channel PMBus Power System Manager ...
In this video, a new high speed CMOS output comparator ...
The LT8640 is a 42V, 5A synchronous step-down regulator ...
The LTC2000 high-speed DAC has low noise and excellent ...
How do you protect the load and ensure output continues to ...