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resistion
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re: EUV startup in talks with ASML, seeks $5 million
resistion   7/29/2012 8:46:11 PM
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The collection efficiency is quite low, most of the power is converted to heat. Essentially it's a high-kW heater. http://www.aa.washington.edu/research/ZaP/publications/APS06_munson.pdf

resistion
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re: EUV startup in talks with ASML, seeks $5 million
resistion   7/10/2012 3:08:24 AM
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It's discharge pulse power x duty cycle that matters, and shorter pulse is preferred for speed.



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