Of course they would. This deal was stuck at a much lower share price. Since the Intel announcement ASML share price has increased by over 40%. This is like free options and a nice way to add book value to your own equity.
@resistion- ASML said up front it would offer up to 25 percent total (and the company capped Intel's stake at 15 percent). Barring a change of plan, that leaves only 5 percent for Samsung. And I personally don't think Samsung would want 20 percent. It remains to be see if Samsung even wants to buy 5 percent.