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resistion
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re: ASML doubles down on EUV
resistion   11/17/2012 1:52:27 PM
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Nikon may be planning a coup against ASML in EUV. http://www.nikonprecision.com/ereview/spring_2012/news-04.html

resistion
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re: ASML doubles down on EUV
resistion   10/25/2012 12:43:19 PM
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And as the resist becomes thinner and thinner, for smaller CD design rules, fewer and fewer photons are absorbed per sq. nm, exacerbating the shot noise and LER issues.

resistion
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re: ASML doubles down on EUV
resistion   10/25/2012 6:43:50 AM
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The Sematech TWG showed this year that the low thickness of EUV resist is also a significant factor.

any1
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re: ASML doubles down on EUV
any1   10/22/2012 6:55:12 PM
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It's not just the consolidation of a couple of equipment companies. Remember ASML invited Intel, Samsung, and TSMC to become part owners as well. So now we have everything from design through fabrication AND the equipment used to do it all intertwined together. At some point if the cost of making EUV work is so costly then maybe it's just not viable right now. Maybe the single minded pursuit of EUV litho is draining investment out of the semi industry that could better be spent elsewhere.

double-o-nothing
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re: ASML doubles down on EUV
double-o-nothing   10/21/2012 12:17:36 PM
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With only a few photons absorbed per sq. nm., no wonder the edge roughness is so persistent at the nm scale.

resistion
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re: ASML doubles down on EUV
resistion   10/21/2012 3:38:38 AM
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Buying cymer might be best way to get out of EUV, since cymer is 80 % of the duv laser base. They gain even more with multiple double patterning layers.

de_la_rosa
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re: ASML doubles down on EUV
de_la_rosa   10/20/2012 9:12:03 PM
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ASML MT must be stressed.

photoneer
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re: ASML doubles down on EUV
photoneer   10/19/2012 2:58:57 PM
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When has a technology ever improved 400% in the last 10% of its R&D cycle?

marcos83
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re: ASML doubles down on EUV
marcos83   10/19/2012 11:14:33 AM
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"The technology haws proven its viability in terms of resolution" Really? I have not seen anything impressive. They are flogging a dead horse.

PV-Geek
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re: ASML doubles down on EUV
PV-Geek   10/18/2012 9:39:41 PM
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Just as the foundry business consolidated as the costs skyrocketed, now the equipment business will do the same. And just as everyone fears the growth of a single foundry domination to be bad for the industry, they will say the same about this segment. The costs just make any other option impractical, like it or not.

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