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marcos83
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re: Quad patterning a possibility at 10nm, says TSMC
marcos83   11/6/2012 1:02:56 PM
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10nm with luck, tricks, bells and whistles. ASML have yet to show anything less than 30nm with a normal operating EUV machine.

krisi
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re: Quad patterning a possibility at 10nm, says TSMC
krisi   11/2/2012 10:00:09 PM
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10nm in 2 years??? That would beat Moore's law expectations...and we are supposed to be facing fundamental limits at that point!

resistion
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re: Quad patterning a possibility at 10nm, says TSMC
resistion   11/2/2012 11:38:21 AM
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So it's pretty clear the timing is pretty bad for EUV.

resistion
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re: Quad patterning a possibility at 10nm, says TSMC
resistion   11/2/2012 9:21:08 AM
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According to German BMBF, 14 nm not even ready until 2015, let alone 10 nm. http://www.electroiq.com/articles/sst/2012/08/euv-lithography-project-launches-for-better-resolution-at-14nm.html



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