I don't know if EETimes does this but SeekingAlpha publishes the transcripts to conference calls with ASML (among other companies). There you can get some more background on the tool situation. The 32 units should refer to immersion units adding to an already large base. Meanwhile no one has enough to do volume production with 11 units distributed among several companies. ASML ironically doesn't want EUV to replace immersion but to coexist with it. DUV immersion is the real cash cow for ASML. So they have advocated a slow, gradual insertion of EUV. So it's fine with them if a company buys more immersion tools for multiple patterning instead of an equivalently expensive number of EUV tools. Cymer sources for both as well.
article states= 32 EUV machines are sold.
CEO of ASML states = 11 EUV machines sold.
CEO '14-nm/20-nm foundry and logic nodes' for NXE:3300B EUV tools in Q2!!! Since when can EUV do 14 or 20 nm logic node?? ? ? ? Where can I see the results?? did EUV solve it's famous 'source' problem????
to author, please report facts!
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