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resistion
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re: Highly scalable vertical gate 3-D NAND
resistion   2/10/2013 4:33:06 PM
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So there is larger capacitance between BL's or WL's than in the gate stack itself?

greenpattern
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re: Highly scalable vertical gate 3-D NAND
greenpattern   2/6/2013 4:38:29 PM
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The WL's and BL's are not individual lines but linked within the same plane, forming forks. The BL fork actually touches source line, not actual fork shape sorry. Voltage over entire plane being same, the capacitive coupling to neighboring plane is serious risk.

resistion
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re: Highly scalable vertical gate 3-D NAND
resistion   2/6/2013 2:16:57 PM
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Fork shape?

greenpattern
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re: Highly scalable vertical gate 3-D NAND
greenpattern   2/6/2013 4:58:01 AM
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These 3D-NAND structures essentially use fork-shaped capacitors - that needs to be taken into account.



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