Breaking News
Comments
Newest First | Oldest First | Threaded View
Page 1 / 3   >   >>
C3_J2Orange
User Rank
Rookie
superlenses
C3_J2Orange   11/20/2013 4:32:28 PM
NO RATINGS

Why super lenses are not considered as an alternative for EUV Lithography. They are not diffraction limited and they can achieve high resolution for 22nm node with conventional UV light source.

C3_J2Orange
User Rank
Rookie
superlenses
C3_J2Orange   11/20/2013 4:32:22 PM
NO RATINGS

Why super lenses are not considered as an alternative for EUV Lithography. They are not diffraction limited and they can achieve high resolution for 22nm node with conventional UV light source.

Henry Berg
User Rank
Rookie
EUV Light Source Alternative: Zplasma Stable DPP
Henry Berg   8/7/2013 6:05:45 PM
NO RATINGS
There is an alternative technology for the production of EUV light at lithography power levels. Zplasma Stable DPP uses Sheared Flow Stabilization to stabilize the EUV-emitting plasma. Stable plasma results in light pulses that are 10-100 times longer than than those produced by the unstable plasmas of other sources. The source uses no tin and has a controlled end to each pulse that does not produce the high-energy debris and molten tin sputtering that have been obstacles for other light sources. We have prototyped and demonstrated the physics of Stable DPP in the lab. Zplasma is seeking funding and development partners to scale our prototype up to the 200 watt light source the industry needs.

resistion
User Rank
CEO
Re: EUV
resistion   7/24/2013 9:13:15 PM
NO RATINGS
As long as these encouraging reports on EUV ignore the fundamental issues like shot noise and the impact of higher NA on the multilayer optics, they will give the incorrectly optimistic forecast.

mcgrathdylan
User Rank
Blogger
Re: EUV
mcgrathdylan   7/24/2013 8:45:15 PM
NO RATINGS
I agree, and I'm not saying that the progress on EUV has not been painstakingly slow. But it does seem to me that they are getting there, little by little. It's not as much progress as chip makers would like, but it is progress. The source power is increasing.

resistion
User Rank
CEO
Re: EUV
resistion   7/18/2013 8:30:11 PM
NO RATINGS
 

 

That can be said for a lot of technologies not just EUV. But not all make it.

mcgrathdylan
User Rank
Blogger
Re: EUV
mcgrathdylan   7/18/2013 8:00:31 PM
NO RATINGS
It is just really hard to believe that all of these super smart people, with money and tons of motivation, aren't going to get this into production eventually. ASML has a lot riding on it (as does Intel, TSMC and Samsung). I just think they will eventually get it to where it needs to be. Not to where chipmakers want it to be, but good enough for manufacturing that is economically viable.

mcgrathdylan
User Rank
Blogger
Re: EUV
mcgrathdylan   7/15/2013 10:26:43 PM
NO RATINGS
Sounds like you are not a proponent. I understand the frustration. Of course if you ordered a PC or a piece of furniture and hadn't received it after eight years you would have gone elsewhere a long time ago (and demanded your money back). But I would say that's not a perfect analogy. PCs and furniture are pretty established products with many vendors and thousands of choices in each category. This is the creation of an entirely new, complex technology that really does bump up against the fundamental laws of physics. I'm not making excuses for the EUV backers, I'm just saying that I understand that this is very difficult stuff. Perhaps too difficult.

Diogenes53
User Rank
Rookie
The Beat Goes On (EUV/SXPL)
Diogenes53   7/15/2013 10:21:30 PM
NO RATINGS

The Week In Review: July 15


By Mark LaPedus
There are more problems surfacing with extreme ultraviolet (EUV) lithography. Yes, the light source remains a problem, but the resists appear to be in decent shape. "The next challenge is the mask blank," said Stefan Wurm, director of Sematech's lithography program. The new problem involves ion beam deposition, which apparently is causing defects and overfill on EUV masks, Wurm said. Work is under way to fix the problem.


Diogenes53
User Rank
Rookie
Re: EUV
Diogenes53   7/15/2013 10:00:16 PM
NO RATINGS
EUV is not the "best hope".  It's strictly political and human emotion, not science.  Too many people have too much invested in SXPL to back off now.  But, ask yourself, if you ordered a PC or a piece of furniture in 2005 for delivery in 2006, and neither was delivered 7 years later, and the vendor still couldn't promise you a delivery date, at what point would you have gone elsewhere?  It is completely irrational to continue to invest in this black hole, but it will continue until it is simply too embarrassing to do so.  Meanwhile, optical, perhaps with a DSA assist and/or imprint will do the heavy lifting.  All the invested SXPL stakeholders will continue to speak of progress and dates just beyond the horizon in the same breath.

Page 1 / 3   >   >>


Flash Poll
Top Comments of the Week
Like Us on Facebook
EE Times on Twitter
EE Times Twitter Feed

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Life
Frankenstein's Fix, Teardowns, Sideshows, Design Contests, Reader Content & More
Max Maxfield

Vetinari Clock: Decisions, Decisions, Decisions …
Max Maxfield
19 comments
Things are bouncing merrily along with regard to my uber-cool Vetinari Clock project. The wooden cabinet is being handcrafted by my chum Bob (a master carpenter) using an amazing ...

Jolt Judges and Andrew Binstock

Jolt Awards: The Best Books
Jolt Judges and Andrew Binstock
1 Comment
As we do every year, Dr. Dobb's recognizes the best books of the last 12 months via the Jolt Awards -- our cycle of product awards given out every two months in each of six categories. No ...

Engineering Investigations

Air Conditioner Falls From Window, Still Works
Engineering Investigations
2 comments
It's autumn in New England. The leaves are turning to red, orange, and gold, my roses are in their second bloom, and it's time to remove the air conditioner from the window. On September ...

David Blaza

The Other Tesla
David Blaza
5 comments
I find myself going to Kickstarter and Indiegogo on a regular basis these days because they have become real innovation marketplaces. As far as I'm concerned, this is where a lot of cool ...