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C3_J2Orange
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superlenses
C3_J2Orange   11/20/2013 4:32:28 PM
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Why super lenses are not considered as an alternative for EUV Lithography. They are not diffraction limited and they can achieve high resolution for 22nm node with conventional UV light source.

C3_J2Orange
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superlenses
C3_J2Orange   11/20/2013 4:32:22 PM
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Why super lenses are not considered as an alternative for EUV Lithography. They are not diffraction limited and they can achieve high resolution for 22nm node with conventional UV light source.

Henry Berg
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EUV Light Source Alternative: Zplasma Stable DPP
Henry Berg   8/7/2013 6:05:45 PM
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There is an alternative technology for the production of EUV light at lithography power levels. Zplasma Stable DPP uses Sheared Flow Stabilization to stabilize the EUV-emitting plasma. Stable plasma results in light pulses that are 10-100 times longer than than those produced by the unstable plasmas of other sources. The source uses no tin and has a controlled end to each pulse that does not produce the high-energy debris and molten tin sputtering that have been obstacles for other light sources. We have prototyped and demonstrated the physics of Stable DPP in the lab. Zplasma is seeking funding and development partners to scale our prototype up to the 200 watt light source the industry needs.

resistion
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Re: EUV
resistion   7/24/2013 9:13:15 PM
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As long as these encouraging reports on EUV ignore the fundamental issues like shot noise and the impact of higher NA on the multilayer optics, they will give the incorrectly optimistic forecast.

mcgrathdylan
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Re: EUV
mcgrathdylan   7/24/2013 8:45:15 PM
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I agree, and I'm not saying that the progress on EUV has not been painstakingly slow. But it does seem to me that they are getting there, little by little. It's not as much progress as chip makers would like, but it is progress. The source power is increasing.

resistion
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CEO
Re: EUV
resistion   7/18/2013 8:30:11 PM
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That can be said for a lot of technologies not just EUV. But not all make it.

mcgrathdylan
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Re: EUV
mcgrathdylan   7/18/2013 8:00:31 PM
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It is just really hard to believe that all of these super smart people, with money and tons of motivation, aren't going to get this into production eventually. ASML has a lot riding on it (as does Intel, TSMC and Samsung). I just think they will eventually get it to where it needs to be. Not to where chipmakers want it to be, but good enough for manufacturing that is economically viable.

mcgrathdylan
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Re: EUV
mcgrathdylan   7/15/2013 10:26:43 PM
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Sounds like you are not a proponent. I understand the frustration. Of course if you ordered a PC or a piece of furniture and hadn't received it after eight years you would have gone elsewhere a long time ago (and demanded your money back). But I would say that's not a perfect analogy. PCs and furniture are pretty established products with many vendors and thousands of choices in each category. This is the creation of an entirely new, complex technology that really does bump up against the fundamental laws of physics. I'm not making excuses for the EUV backers, I'm just saying that I understand that this is very difficult stuff. Perhaps too difficult.

Diogenes53
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The Beat Goes On (EUV/SXPL)
Diogenes53   7/15/2013 10:21:30 PM
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The Week In Review: July 15


By Mark LaPedus
There are more problems surfacing with extreme ultraviolet (EUV) lithography. Yes, the light source remains a problem, but the resists appear to be in decent shape. "The next challenge is the mask blank," said Stefan Wurm, director of Sematech's lithography program. The new problem involves ion beam deposition, which apparently is causing defects and overfill on EUV masks, Wurm said. Work is under way to fix the problem.


Diogenes53
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Re: EUV
Diogenes53   7/15/2013 10:00:16 PM
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EUV is not the "best hope".  It's strictly political and human emotion, not science.  Too many people have too much invested in SXPL to back off now.  But, ask yourself, if you ordered a PC or a piece of furniture in 2005 for delivery in 2006, and neither was delivered 7 years later, and the vendor still couldn't promise you a delivery date, at what point would you have gone elsewhere?  It is completely irrational to continue to invest in this black hole, but it will continue until it is simply too embarrassing to do so.  Meanwhile, optical, perhaps with a DSA assist and/or imprint will do the heavy lifting.  All the invested SXPL stakeholders will continue to speak of progress and dates just beyond the horizon in the same breath.

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