The Week In Review: July 15
By Mark LaPedus
There are more problems surfacing with extreme ultraviolet (EUV) lithography. Yes, the light source remains a problem, but the resists appear to be in decent shape. "The next challenge is the mask blank," said Stefan Wurm, director of Sematech's lithography program. The new problem involves ion beam deposition, which apparently is causing defects and overfill on EUV masks, Wurm said. Work is under way to fix the problem.