Why dose IMEC roadmap include FDSOI at 14nm today if it will drop it beyond 14nm?
FDSOI was invented by IBM over a decade ago, but still not manufacturable at any
technology node yet, including FDSOI at 35 and 28nm. 28nm Bulk Si is in mass production for several years by major semiconductor companies.
Ge or InGaAs replacement processes are extremely difficult to be implemented in FinFET
manufacturing. I do not think such replacement processes are necessary to enhance FinFET performance. SKim
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