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resistion
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resistion
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EUV Shot Noise Tutorial from Samsung
resistion   2/28/2014 10:38:46 PM
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resistion
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a disaster with misalignment of the 200kW laser that damaged some other components
resistion   2/28/2014 10:27:55 PM
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Sounds like the CO2 laser missed the tin plasma and struck the collector mirror on the other side. That's quite crippling. Wonder if they'll replace the source, even if the tool is running again.

Diogenes53
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EUV Revivial?
Diogenes53   2/28/2014 1:09:04 PM
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http://semiengineering.com/euv-suffers-new-setback/

 

Not sure EETimes attended the same papers I attended.  I heard both papers, and spoke with several colleaggue.  The consensus was universal: all believed in the Semiconductor Engineering version (link above).  The papers were anything but a revival.

double-o-nothing
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Re: Do you still believe in EUV?
double-o-nothing   2/28/2014 9:46:51 AM
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Gridded arrays are being adopted by logic greatly simplifying the difficulty of printing patterns.

Yes indeed this would make things much simpler, we may not need more than two passes through 193i litho even for quadruple patterning at 7 nm.

ScottenJ
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Re: Do you still believe in EUV?
ScottenJ   2/27/2014 9:06:37 PM
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Rick, that sounds good. I am probably a couple of months away from a full result set.

rick merritt
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Re: Do you still believe in EUV?
rick merritt   2/27/2014 7:42:16 PM
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@ScottenJ: I'd love to do an interview on your assessment of the aternatives when you have the numbers together!

ScottenJ
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Re: Do you still believe in EUV?
ScottenJ   2/27/2014 6:59:49 PM
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I haven't seen good cost estimates but that is actually my primary area of experitise these days.  I am currently working with several lithography and materials experts on detailed comparisons of all of the alternatives.

I can say that Intel has detailed plans through 10nm and they are forecasting that their cost per die is going to continue to go down ~30% for each of the 14nm and 10nm nodes. Intel is a little bit unique at the moment in that they are doing a full srink at 14nm where many foundries are maintaing the same BEOL for 14/16nm that they have at 20nm

rick merritt
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Re: Do you still believe in EUV?
rick merritt   2/27/2014 6:28:36 PM
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@ScottenJ: Thankls for your take from the event, especially the other sessions you saw.

Have you heard any estimates of the kinds of cost adders people might see with quad and octal patterning?

rick merritt
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Re: Do you still believe in EUV? (question is, do the primes believe?)
rick merritt   2/27/2014 6:26:03 PM
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@eejack: I suspect you are right. There are probably some pretty interesting shoes yet to fall.

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