Design Con 2015
Breaking News
Comments
Oldest First | Newest First | Threaded View
Page 1 / 3   >   >>
rick merritt
User Rank
Author
Intel has 10nm w/o EUV
rick merritt   7/30/2014 1:48:11 PM
NO RATINGS
This just in from Intel fellow Mark Bohr:

"Intel has a way to achieve good density and good cost-per-transistor on our 10 nm technology without the use of EUV. 

We are continuing to explore EUV and non-EUV options for our 7nm technology."

wilber_xbox
User Rank
Manager
good news
wilber_xbox   7/30/2014 2:16:01 PM
NO RATINGS
This will for sure put some cheers on the face of semiconductor manufacturing industry as this will ultimately result in lower cost and complexicity. However, ASML has to go a long way to give more than 100wph that will make EUV truely production ready.

wilber_xbox
User Rank
Manager
Re: Intel has 10nm w/o EUV
wilber_xbox   7/30/2014 2:20:10 PM
NO RATINGS
Rick, is it using the existing methods such as unidirectional patterns, mask optimization and breaking the chip patterns into 2-3 masks etc or something more innovative.

resistion
User Rank
CEO
Re: good news
resistion   7/30/2014 2:31:20 PM
NO RATINGS
Besides light source power, EUV already has other resolution-limiting issues like shot noise and multilayer angular bandwidth. And it's still nowhere near 100 WPH.

resistion
User Rank
CEO
Re: Intel has 10nm w/o EUV
resistion   7/30/2014 4:41:19 PM
NO RATINGS
They use "pitch quartering" for 15-22 nm half-pitch lines. There can be up to four additional "cut" exposures.

rick merritt
User Rank
Author
Re: Intel has 10nm w/o EUV
rick merritt   7/30/2014 11:52:53 PM
NO RATINGS
@Wilbur: I did not know to ask but I will request an IBM engineer jump on and answer.

rick merritt
User Rank
Author
Re: good news
rick merritt   7/30/2014 11:55:08 PM
NO RATINGS
@resistion: 34 wafers/hour to be specific

resistion
User Rank
CEO
Re: Intel has 10nm w/o EUV
resistion   7/31/2014 1:12:19 AM
NO RATINGS
I thought he was referring to Intel's 10 nm, otherwise the EUV requiring these would defeat the purpose.

resistion
User Rank
CEO
Re: good news
resistion   7/31/2014 1:19:44 AM
NO RATINGS
34 WPH is still below the previous 70 WPH target. 20 mJ/cm2 dose is also quite noisy below 20 nm.

wilber_xbox
User Rank
Manager
Re: Intel has 10nm w/o EUV
wilber_xbox   7/31/2014 4:29:16 AM
NO RATINGS
introducting more masks and cut masks should drive the price per die so economically EUV will be much better IMO.

Page 1 / 3   >   >>


Top Comments of the Week
Flash Poll
Like Us on Facebook

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Life
Frankenstein's Fix, Teardowns, Sideshows, Design Contests, Reader Content & More
<b><a href=Betajet">

The Circle – The Future's Imperfect in the Present Tense
Betajet
5 comments
The Circle, a satirical, dystopian novel published in 2013 by San Francisco-based writer Dave Eggers, is about a large, very powerful technology company that combines aspects of Google, ...

Max Maxfield

Recommended Reads From the Engineer's Bookshelf
Max Maxfield
27 comments
I'm not sure if I read more than most folks or not, but I do I know that I spend quite a lot of time reading. I hate to be idle, so I always have a book or two somewhere about my person -- ...

Martin Rowe

Make This Engineering Museum a Reality
Martin Rowe
Post a comment
Vincent Valentine is a man on a mission. He wants to make the first house to ever have a telephone into a telephone museum. Without help, it may not happen.

Rich Quinnell

Making the Grade in Industrial Design
Rich Quinnell
16 comments
As every developer knows, there are the paper specifications for a product design, and then there are the real requirements. The paper specs are dry, bland, and rigidly numeric, making ...

Special Video Section
The LT8640 is a 42V, 5A synchronous step-down regulator ...
The LTC2000 high-speed DAC has low noise and excellent ...
How do you protect the load and ensure output continues to ...
General-purpose DACs have applications in instrumentation, ...
Linear Technology demonstrates its latest measurement ...
10:29
Demos from Maxim Integrated at Electronica 2014 show ...
Bosch CEO Stefan Finkbeiner shows off latest combo and ...
STMicroelectronics demoed this simple gesture control ...
Keysight shows you what signals lurk in real-time at 510MHz ...
TE Connectivity's clear-plastic, full-size model car shows ...
Why culture makes Linear Tech a winner.
Recently formed Architects of Modern Power consortium ...
Specially modified Corvette C7 Stingray responds to ex Indy ...
Avago’s ACPL-K30T is the first solid-state driver qualified ...
NXP launches its line of multi-gate, multifunction, ...
Doug Bailey, VP of marketing at Power Integrations, gives a ...
See how to ease software bring-up with DesignWare IP ...
DesignWare IP Prototyping Kits enable fast software ...
This video explores the LT3086, a new member of our LDO+ ...
In today’s modern electronic systems, the need for power ...