REGISTER | LOGIN
Breaking News
Comments
Newest First | Oldest First | Threaded View
resistion
User Rank
Author
EMDRS
resistion   3/10/2017 9:23:24 PM
NO RATINGS
Indeed, a zone plate (ZP) is not efficient optics. Inspection must take a very long time.

resistion
User Rank
Author
Counting EUV tools
resistion   3/10/2017 8:41:35 PM
NO RATINGS
So I gather there are 14 tools in the field which are 3300 or 3350, and are not suited for HVM, and no 3400 for HVM installed yet. In the meantime, there are over 100 installed immersion tools?

resistion
User Rank
Author
Re: ASML doesn't own the resist
resistion   3/4/2017 8:42:15 AM
NO RATINGS
Originally, the expectation was to continue using chemically amplified polymeric resists. However, their roughness is quite severe. Metal oxide resists or metal-containing resists have been proposed and evaluated with their greater absorption. Now, Irresistible Materials also proposes fullerene-based resists at SPIE. It seems all these newer resists are going to be used at >20 mJ/cm2, so ASML's throughput projections will have to be discounted accordingly. With 210W, they must be using a noisy 17 mJ/cm2.

TanjB
User Rank
Author
Re: ASML doesn't own the resist
TanjB   3/3/2017 11:58:58 AM
NO RATINGS
Any pointers to the different kinds of resists that are being tried?  It would seem to be a topic worth an article in its own right.

resistion
User Rank
Author
ASML doesn't own the resist
resistion   3/1/2017 11:16:35 AM
NO RATINGS
Their throughput (WPH) claims are tied to the 20 mJ/cm2 assumption, but on the other hand, this depends on the resist used. Without pinning the resist down (and there are many choices), ASML can't really make that claim.



Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
Like Us on Facebook