BELMONT, Calif. -- Look for Nikon Inc. to introduce a new version of its lithography tools, based on 193-nanometer argon-fluoride (ArF) technology, at next month's Semicon West trade show, according to industry sources.
Sources indicated that the Japanese chip-equipment giant will announce its fourth-generation S306C scanner, which is a 193-nm tool designed for processing high-speed devices like memories and microprocessors.
The S306C is a high numerical aperture (NA) platform geared for the 100-nm (0.10-micron) technology node. It features an NA of about 0.78, the sources said.
The S306C also reportedly makes use of Nikon's own lithography-lens material. In the past, Nikon has procured the calcium-fluoride (CaF2) material for its 193-nm scanners from outside sources. But the new tool will use lens material from its new $37 million plant in Tokyo (see March 14 story).
The new exposure tool from Nikon also has an overlay accuracy of 25-nm or better. With a field size of 25-by-33-mm, the new S306C will be marketed as ideal for "mix-and-match" lithography applications in wafer fabs that also utilize Nikon's 248-nm scanners.
The new step-and-scan system has a throughput of more than 135 eight-inch (200-mm) wafers per hour or more than 85 twelve-inch (300-mm) wafers per hour, according to knowledgeable sources.
The S306C is a more advanced version of the company's current 193-nm tool. Dubbed the S305B, Nikon's existing 193-nm exposure tool is geared for processing devices down to about the 110-nm node.
Nikon isn't the only player aggressively pursuing the 193-nm lithography market. The new Nikon system will compete against other scanners being sold by ASM Lithography of the Netherlands and Canon Inc. of Japan.
Sources believe that ASML is also developing a new 193-nm tool as well. Silicon Valley Group Inc., which is now owned by ASML, is also in the process of shipping a separate 193-nm platform. But SVG's 193-nm tool is late to market--a delay that has impacted Intel Corp. and other chip manufacturers. In April, SVG said it would delay shipping its 193-nm tool from April to July. This scanner is supposedly being shipped to Intel (see April 25 story).
In fact, Intel mainly uses two lithography vendors--Nikon and SVG. Now it is believed that Nikon will ship its new 193-nm tool to Intel and other chip customers as the battle for next-generation lithography continues to heat up.
RSS
Digital
10 emerging technologies to watch:
EE Times has compiled a list of emerging technologies that we think will be worth watching out for in 2010. Biofeedback or thought-control of electronics are among the contenders.
Hot applications in 2010:
We've compiled a list of 10 technology applications you should watch for in 2010, ranging from e-book readers to 3-D TVs. We examine the features that make these apps so compelling as well unresolved issues.
Top 25 predictions for semis in 2010:
2010 is just beginning to unfold in the electronics industry. Looking into our crystal ball, we have released our own chip forecasts--and other predictions--for 2010.
Seven things to fix in 2010:
The editors of EE Times came up with their own informal list of things we hope engineers fix in 2010, spanning everything from nano-lithography to space travel. What do you want to see get done this year?
'09 moves that are shaping the future:
This was a brutal year, but the industry gets a nod for showing grace under fire. Here's our Top 10 guide to the coming year, illustrating what to expect in 2010.
10 CEOs out in 2009:
It's been a tough year for the global electronics industry and CEOs. We survey the dismissal of 10 industry CEOs during the first three quarters of 2009 and what's ahead for the rest of the year.
Notable women in microelectronics:
There is no better time than a global economic recession to examine the keys to successful corporate governance. So, EE Times has compiled an international list that celebrates women who are business and technology leaders in semis.
EE Times updates Silicon 60:
Seventeen companies have been added to the lastest version of our Silicon 60 list of emerging startups. Forty-three companies survived as emerging companies that are still worth watching.
RSS| 
Digital| 
Mobile
