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Microsoft takes step in IC-equipment industry
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Silicon Strategies


HALF MOON BAY, Calif. — Hoping to jumpstart a new and emerging data-acquisition standard for semiconductor equipment, International Sematech and SEMI have enlisted help from an unlikely partner — Microsoft Corp.

Under the plan, Microsoft is taking a step into the semiconductor equipment world, by working with Sematech and SEMI to develop and provide software solutions for the new and emerging data-acquisition standard, dubbed Interface A.

The software giant hopes to tune and make its .NET product line as the underpinning technology for Interface A. Microsoft's .NET is a set of software technologies for connecting systems and devices, which apparently includes semiconductor equipment.

Interface A refers to the port on manufacturing equipment used to send data from the tool to the factory systems. The interface enables fabs to have access to detailed process, measurement and operational data from fab equipment.

The data from the Interface A port is parsed into an output data stream, which can be used by a fab's APC environment and other enterprises. Interface A is intended to replace and overcome deficiencies of the earlier SECS/GEM port on fab tools.

With its software technology, Microsoft is looking to help propel the adoption of the Interface A standard in the semiconductor industry, said John McCallum, industry manager for high tech at the software giant.

Microsoft is working with several groups and fab-equipment companies in the arena. "We are just getting started," he said.

The software giant is working to enable its .NET offering as the underpinning technology for the Interface A standard. Microsoft's existing .NET technology "enables a high level of software integration through the use of XML Web services — small, discrete, building-block applications — that connect to each other as well as to other, larger applications over the Internet," according to the company.

It includes the so-called .NET Framework 1.1 platform, which enables Web-based applications and XML Web services. It facilitates data and adheres to the specified inline simple object access protocol (SOAP 1.1) and hyper text transfer protocol (HTTP 1.1) using an Extensible Markup Language (XML).

Its technology is also aimed to one day enable e-diagnostics in semiconductor fabs, according to McCallum. E-diagnostics means the ability to troubleshoot semiconductor production equipment from afar, tapping the expertise of service and design engineers at an equipment vendor's headquarters to quickly fix a problem on fab lines around the world. Ideally, fab production employees would be able to fire off an e-mail or instant message to the vendor when troubles arise, and get a response with several potential fixes within hours -- minutes, maybe.






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