LONDON — The Semiconductor Equipment and Materials International (SEMI) trade association is joining with the International Technology Roadmap for Semiconductors (ITRS) to launch a roadmap for how energy consumption will be reduced, or increases mitigated, in tools, processes and equipment for the production of semiconductor components.
SEMI is launching an initiative to identify the drivers, obstacles, and opportunities for advancing energy conservation and is collaborating with the International Sematech Manufacturing Initiative ISMI, the WSC energy conservation working group of the World Semiconductor Council (WSC) and the environmental health and safety working group of the ITRS.
The roadmap, likely be defined in late 2009 or early 2010, is expected to highlight where improvements in energy conservation can be made and identify how to achieve those results.
Targets are likely to include: energy reduction of mature (200-mm) equipment; energy conservation goals for 450-mm equipment; idle mode; component energy ratings; exhaust reduction; heat dissipation; right-sizing support systems; equipment efficiency and power management efficiencies; fab energy simulation tools.
SEMI, ITRS, WSC and ISMI are plotting a series of meetings for 2009 and beyond. Workshops at Semicon West and Semicon Japan are iikely to be two hosted by SEMI.
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