WASHINGTON — A Princeton University professor specializing in nanotechnology has been honored by the IEEE for his work applying the technology to lithography.
Stephen Chou, head of Princeton's Nanostructure Laboratory, received the 2004 IEEE Cledo Brunetti Award for his work in developing tools for nanoscale patterning, especially nanoimprint lithography, the engineering group said. It also cited Chou's work "in the scaling of devices into new physical regimes."
Chou's work has also been cited by International Sematech, which earlier this year called nanoimprint lithography a next-generation technology for chip manufacturing.
Chou will receive the award on Dec. 14 during the IEEE's International Electron Devices Meeting in San Francisco.
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