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Few Surprises as Intel, GF Detail Process Technologies
12/7/2017

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Globalfoundries' Gary Patton speaks after being presented with the 2017 IEEE Frederik Philips Award at IEDM.  Credit: Dylan McGrath/EE Times
Globalfoundries' Gary Patton speaks after being presented with the 2017 IEEE Frederik Philips Award at IEDM.
Credit: Dylan McGrath/EE Times

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resistion
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SAQP flexibility
resistion   12/12/2017 2:34:09 PM
NO RATINGS
For 36 nm pitch and below, SAQP looks like the expected way, even if using EUV. And yet they complain the flexibility? SADP is not much better.

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