REGISTER | LOGIN
Breaking News
News & Analysis

What is source-mask optimization?

2/27/2009 05:00 AM EST
1 Comment
NO RATINGS
Page 1 / 3 Next >
More Related Links
View Comments: Oldest First | Newest First | Threaded View
resistion
User Rank
Author
Influence of noise
resistion   1/5/2016 6:51:09 PM
NO RATINGS
Source-mask optimization involves re-adjustment of point sources of light in the pupil. There could be some noise impact, especially if these are small dose components. It is even more severe for EUV.

Most Recent Comments
rick merritt
 
Tim R Johnson
 
ewertz
 
antedeluvian
 
ewertz
 
perl_geek
 
R_Colin_Johnson
 
perl_geek
 
R_Colin_Johnson
Most Recent Messages
11/19/2017
3:31:42 PM
Like Us on Facebook
EE Times on Twitter
EE Times Twitter Feed