# Electrically-aware design improves analog/mixed-signal productivity

**Electromigration and its causes**

Electromigration
(EM) effects can seriously damage interconnect wires and vias, having
an adverse impact on IC reliability. Electrically-aware design provides
new in-design methodology opportunities for EM verification, and the
same general methodology could be applied to a range of in-design
electrical checking and simulation solutions.

EM is the transport
of material in a solid conductor that results from collisions between
the flow of electrons and metal atoms in the interconnect. Proportional
to the current per unit area, the continual movement of metal atoms from
their lattice position can lead to a degradation in performance as the
resistance of the interconnect increases. At some point the wire
eventually fails, creating an electrical open (void) or short connection
(hillock) downstream.

The dominant factor in determining mean
time to failure (MTTF) is the current density. Since current density
depends on the wire geometry, it cannot be determined until the routed
net is generated. Given that the width of the wire or via is a variable,
designers need to know whether the current flowing through that
particular area has exceeded the maximum allowed current. The maximum
current limit for a given geometry is expressed as rules that every wire
segment or via must adhere to for a specified operating or maximum
temperature. This set of rules is contained in a technology file that is
computed and distributed according to each process technology
specification.

With the aggressive scaling of interconnect
geometries at advanced technology nodes, the EM effects are dependent
not only on the local current density of a geometric wire segment or
via, but also on the homogeneity of the current flow through a region.
As such, current density limits or rules vary based on not just each
geometric dimension of the wire segments and vias, but on the geometries
of the connecting wires and vias as well.

There are additional
complications. There is a minimum length below which the net won't fail
due to EM, commonly referred to as Blech length. This adds another
dimension to the problem of sizing a wire for EM. The EM rules for a
metal layer are specified in buckets for different limits based on the
width and length of shapes on the layer. Without assistance from an EDA
tool, it would be cumbersome for a layout engineer to route nets on
various layers and account for the ever-increasing number of EM rules
associated with these buckets.

The EM rules become even more
complicated when vias and contacts are considered. Traditionally, single
via or contact cuts had a current density number associated with them,
while clusters of vias would have more relaxed rules. At advanced
technology nodes, a single via or contact will have different current
density limits based on different shapes (e.g. square or rectangular).
This issue is compounded when additional conductors are connected to the
via(s) and the current density limits can change based on the width and
length of the connecting conductors.

This behavior is
illustrated in Figure1 with three interconnect examples that are based
on different widths and lengths of connecting wires. All three have
different current density (EM) limits. Each has an upper and lower
interconnect wire connected through the same via shape, but each example
forms a different geometric profile where the length or width
dimensions of the interconnect differ.

The leftmost connection
in the figure has the shortest lengths in the dimension of the upper and
lower interconnect wires, with the result that the connecting via cut
has the highest current density limit and thus can carry the most
current without violating the limit. The middle connection has the same
interconnect wire width as the left one, but the wire lengths of the
upper and lower interconnect are much longer. The impact is that the
current density limit for the via cut is lower than the left example. As
such, the middle connection can carry less current and remain within
the EM-related reliability limits.

In the rightmost connection
in Figure 1, the upper and lower interconnect lengths are the same but
the width of the wires coming into the via are reduced. The result is
that the current density limit for the via cut is significantly reduced
from the middle and leftmost examples. Note that in all three examples
the via geometry is the same and, if examined without any context of the
surrounding wire geometry, it is impossible to know which current
density limits to apply.

In addition to the geometric properties of the interconnect, the underlying topology of the routing can also significantly change the distribution of current flow and, subsequently, current densities. Thus the same geometric description (such as a specific width and length of a wire) may or may not meet pre-specified current density limits, depending on the topology of the surrounding interconnect.

Figures 2 and 3 highlight a case where the incoming current to the MOS device may be connected to the strap in two different locations. In Figure 2, the current is sourced into one side of the M2 strap, which results in a large amount of current flowing through the strap to reach the M1 vertical finger connections on the other end. Color coding is used to indicate the proximity of that wire location to the specified current density limit. In this case, the green coding indicates that the current is far from reaching the limit; red coding represents that the current is over the limit for that particular wire segment.

In Figure 3, the incoming current is connected to the middle of the M2 strap and, as such, the current is distributed more evenly throughout the source vertical connections (fingers). As the color coding indicates, the current limit is not exceeded, even though the geometric properties of the fingers, strap, and incoming wire are very similar—the primary distinction being where the connection has been made. This example also illustrates why it is difficult to specify current-correct routing decisions a priori without knowledge of the underlying topology. This rather simple case was chosen to illustrate the problem, but there are many such cases where the correction to the routing topology is not straightforward, often resulting in a cycle of layout modification, extraction, and analysis.

The prior examples illustrate just some of the complexities of designing at advanced nodes. As the rules become more geometry-dependent, it will become increasingly difficult to know which wire segments or vias to fix and how to do so without creating another violation. The following paragraphs propose an electrically-aware design methodology for in-design EM checking that improves productivity while reducing the risk and uncertainty of moving to advanced nodes.

Author

LJohnso58 11/1/2012 6:47:26 PM

Author

Guru of Grounding 11/1/2012 6:45:28 PM

Author

Ron.Koths 11/1/2012 3:37:43 PM