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ASML Continues to Ramp EUV Shipments

10/19/2017 00:31 AM EDT
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resistion
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Re: 250W enough?
resistion   10/22/2017 5:26:53 AM
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The dose for contact and via layers goes to 80 mJ/cm2, so the required power is now 1kW. http://goldberg.lbl.gov/papers/Naulleau_SPIE_99840P_2016.pdf

Ellis
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Re: 250W enough?
Ellis   10/20/2017 5:04:09 AM
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That and the losses the pellicle will incur. Unless there's a breakthrough in resist chemistry yielding a low dose, good LWR resist. 500W seems more realistic for a HVM capable machine.

double-o-nothing
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250W enough?
double-o-nothing   10/19/2017 7:57:59 PM
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250 W is for 20 mJ/cm2, but with doses going to over 30 mJ/cm2, they need to go over 375 W.

resistion
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pellicle lifetime
resistion   10/19/2017 6:17:07 AM
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Normally, a lifetime would be specified, for example at 250W. In addition, the wrinkling happens during cooldown at 0W just from the thermal cycling.

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