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Few Surprises as Intel, GF Detail Process Technologies

12/7/2017 02:01 AM EST
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resistion
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SAQP flexibility
resistion   12/12/2017 2:34:09 PM
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For 36 nm pitch and below, SAQP looks like the expected way, even if using EUV. And yet they complain the flexibility? SADP is not much better.

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