REGISTER | LOGIN
Breaking News
Comments
Newest First | Oldest First | Threaded View
FChen
User Rank
Author
re: E-beam: Ecosystem investment grows, but more neede
FChen   11/15/2010 2:16:52 PM
NO RATINGS
Isn't it just one more random electron scattering factor?

double-o-nothing
User Rank
Author
re: E-beam: Ecosystem investment grows, but more neede
double-o-nothing   11/15/2010 1:06:47 PM
NO RATINGS
Charging is another inevitable factor that needs to be possibly captured by DFEB.

double-o-nothing
User Rank
Author
re: E-beam: Ecosystem investment grows, but more neede
double-o-nothing   9/23/2010 12:13:10 PM
NO RATINGS
This is a really nice piece, thanks very much. Perhaps some comments, more general in nature, are in order. First, going down below 40 nm, no matter what radiation you use, the resist is going to limit you, either in throughput or resolution. Particularly these chemically amplified types. Second, at the same dose, smaller features use less incident particles (photons, electrons, etc.) so are naturally more prone to random dose variations (sometimes called shot noise). Third, the CD vs dose model needs to be discussed much more openly especially as more critical features are being added.



Like Us on Facebook
EE Life
Frankenstein's Fix, Teardowns, Sideshows, Design Contests, Reader Content & More
Martin Rowe

Test Tool Finds Ethernet Wiring Errors
Martin Rowe
Post a comment
When my house was renovated several years ago, I had the electrician install network outlets in numerous places, then run the LAN cables to a wiring closet. But he didn't document the ends ...

Martin Rowe

Local Electronics Store Supplies Engineers and Hobbyists
Martin Rowe
5 comments
Rochester, N.Y. — Tucked away in this western New York city known for its optics is Goldcrest Electronics, a local store that's supplied businesses and individuals with electronic ...

Martin Rowe

How to Transform a Technology University (Book Review)
Martin Rowe
1 Comment
The Presiding Genius of the Place by Alison Chisolm. WPI, Worcester, Mass., 234 pp., 2016. Engineers love to discuss, and often criticize, engineering education. They often claim ...

Max Maxfield

Aloha from EEWeb
Max Maxfield
Post a comment
Just a few minutes ago as I pen these words, I posted this blog about this month's Cartoon Punchline Competition over on EEWeb.com.