REGISTER | LOGIN
Breaking News
Comments
Newest First | Oldest First | Threaded View
krisi
User Rank
Author
re: TSMC ready to flip the switch on EUV
krisi   9/8/2011 6:29:07 PM
NO RATINGS
Testing all 3 competing lithography techniques sounds like an expensive proposition. It probably also means that it is still unclear which one will move to manufacturing...Kris

GoViking
User Rank
Author
re: TSMC ready to flip the switch on EUV
GoViking   9/7/2011 6:49:52 PM
NO RATINGS
E-beam direct write...Long time coming!: I visited Bill Livesay at E-Beam Microfabrication (EBM) on Miramar Rd in San Diego in 1978, who was a pioneer in e-beam direct write; Howard Bogert published a newsletter in about 1980 for Dataquest, entitled, "E-Beam is Economic for Mask-Making". Maybe only the hard stop now faced by optical litho pushes e-beam to the forefront...or maybe not. We always have a way of extending the lifetime of 'inertial' technologies more than we ever imagined was possible.

resistion
User Rank
Author
re: TSMC ready to flip the switch on EUV
resistion   9/6/2011 12:40:50 PM
NO RATINGS
To be fair, other companies have tried other NGLs besides EUV as well. Toshiba and Samsung have worked on imprint, IBM and Samsung worked on DSA. Long ago Intel, IBM tried xray.

resistion
User Rank
Author
re: TSMC ready to flip the switch on EUV
resistion   9/6/2011 12:04:46 PM
NO RATINGS
Didn't hear much detail about the kla tool.



Like Us on Facebook
EE Life
Frankenstein's Fix, Teardowns, Sideshows, Design Contests, Reader Content & More
Martin Rowe

Test Tool Finds Ethernet Wiring Errors
Martin Rowe
Post a comment
When my house was renovated several years ago, I had the electrician install network outlets in numerous places, then run the LAN cables to a wiring closet. But he didn't document the ends ...

Martin Rowe

Local Electronics Store Supplies Engineers and Hobbyists
Martin Rowe
5 comments
Rochester, N.Y. — Tucked away in this western New York city known for its optics is Goldcrest Electronics, a local store that's supplied businesses and individuals with electronic ...

Martin Rowe

How to Transform a Technology University (Book Review)
Martin Rowe
1 Comment
The Presiding Genius of the Place by Alison Chisolm. WPI, Worcester, Mass., 234 pp., 2016. Engineers love to discuss, and often criticize, engineering education. They often claim ...

Max Maxfield

Aloha from EEWeb
Max Maxfield
Post a comment
Just a few minutes ago as I pen these words, I posted this blog about this month's Cartoon Punchline Competition over on EEWeb.com.